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Mass Gas Analysis - List of Manufacturers, Suppliers, Companies and Products

Mass Gas Analysis Product List

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[Webinar Invitation] Mass Gas Analysis of Devices

Detection of extremely small amounts of "residual gas" to prevent degradation of semiconductor chips and automotive sensors | Introducing ultra-high-performance "mass gas analyzers," along with industry trends and case studies.

We are pleased to announce that we will be appearing on the digital broadcasting station "Aperza TV" (operated by Aperza Inc.), which is dedicated to engineers involved in manufacturing and research and development! Aperza TV can be viewed for free with prior registration, so please register using the URL below and take this opportunity to watch! ▼ Register here to view the semiconductor and electronic components manufacturing special https://tv.aperza.com/event/92?utm_source=di_10006492 ▽ Detecting extremely small amounts of "residual gas" to prevent degradation of semiconductor chips and automotive sensors https://tv.aperza.com/event/92?webinar=828&utm_source=di_10006492 *Please note that it cannot be viewed on Internet Explorer (recommended viewing browser is Google Chrome).

  • Analytical Equipment and Devices

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Contracted service: Mass gas analysis of devices

Contract analysis services using a high-precision quadrupole mass spectrometry system. We conduct gas analysis of sealed device interiors and bonded wafer interfaces.

Our company offers a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. We employ a vacuum structural material made of 0.2% BeCu alloy with "low gas release" in our analytical equipment, enabling the detection of extremely small leaks below 10^-15 Pa·m³/s (He) through destructive testing of the device. We conduct gas analysis of the interior of sealed devices and the interface of bonded wafers. This contributes to failure analysis, quality improvement, and quality control of semiconductor devices. 【Measurement Examples】 ■ Measurement of residual and released gases between each layer of semiconductor chips ■ Measurement of gas release from semiconductor wafer substrates ■ Gas analysis of the bonded wafer interface ■ Measurement of residual gases within MEMS device chips ■ Ultra-small leak checks of sealed devices *In addition to introducing this service, you can view materials that explain the analytical system by downloading the PDF. Please feel free to contact us with any inquiries.

  • Other semiconductor manufacturing equipment

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